Abstract:Silicon photonics is the most promising technology for applications ranging from large-bandwidth, low power consumption datacom transceivers, to wearable health monitoring devices, or optical data-bus for quantum processors. To bring silicon PIC based products to the market, ultra-low loss waveguides would be preferred. In the conventional submicron silicon platforms, higher propagation loss (in the order of ~1 dB/cm) induced by the roughness of the etched sidewalls, as well as higher fiber-to-waveguide coupling loss due to its sub-micron dimensions impose challenges for its deployment in many products. VTT’s thick-SOI technology offers a promising alternative, owing to its lower propagation loss (~0.1 dB/cm), reduced polarization sensitivity, and capacity to handle higher optical power without exciting nonlinear losses. Its micron-scale cross-section enables efficient edge coupling. Exploiting its ultra-low loss, we have demonstrated unprecedented level of integration such as, a 40-channel array waveguide grating (AWG) based mux/de-mux, or a Faraday rotator based on silicon spirals, without employing any magneto-optic material. Now we reduced the propagation loss further, down to record-low 4 dB/m, by controlled annealing of waveguides in 100% pure H2 environment. In our optimized, MPW-compatible annealing process, the atomic mobility of Si smoothens the scallops from etching, without causing any structural deformation of the waveguides. This substantially reduced loss enabled us to develop ultra-high Q ring resonators on our thick-SOI platform, as well as sidewall smoothening for the active components, thereby making our platform a bedrock for the emerging applications such as, quantum computing, biosensors, and 3D imaging.

Ultralow loss single layer submicron silicon waveguide crossing for SOI optical interconnect.

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Low Loss Broadband Waveguide Crossing for Silicon-on-Insulator Optical Interconnect

High performance ultra-compact SOI waveguide crossing.

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Broadband low loss and ultra-low crosstalk waveguide crossings based on multimode interferometer for 840 nm operation

Series of Ultra-Low Loss and Ultra-Compact Multichannel Silicon Waveguide Crossing

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Ultra-Compact Silicon-Arrayed Waveguide Grating Routers For Optical Interconnect Systems

Low-Loss Waveguide Crossing for Complicated On-Chip Microwave Photonic Processor

Compact Silicon Photonic Waveguide Crossings with Sub- 10-Mdb Loss

Ultra-compact high efficiency and low crosstalk optical interconnection structures based on inverse designed nanophotonic elements

Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

Ultra-Low Loss and Ultra-Compact Polarization-Insensitive SOI Multimode Waveguide Crossing Based on an Inverse Design Method

Ultra-low loss waveguide platform in silicon photonics

Ultra-Compact Birefringence-Compensated Arrayed Waveguide Grating Triplexer Based on Silicon-On-Insulator

Low-Loss V-Groove Coplanar Waveguide On An Soi Substrate

5×5 Μm2 Compact Waveguide Crossing Optimized by Genetic Algorithm