Abstract:Silicon photonics is the most promising technology for applications ranging from large-bandwidth, low power consumption datacom transceivers, to wearable health monitoring devices, or optical data-bus for quantum processors. To bring silicon PIC based products to the market, ultra-low loss waveguides would be preferred. In the conventional submicron silicon platforms, higher propagation loss (in the order of ~1 dB/cm) induced by the roughness of the etched sidewalls, as well as higher fiber-to-waveguide coupling loss due to its sub-micron dimensions impose challenges for its deployment in many products. VTT’s thick-SOI technology offers a promising alternative, owing to its lower propagation loss (~0.1 dB/cm), reduced polarization sensitivity, and capacity to handle higher optical power without exciting nonlinear losses. Its micron-scale cross-section enables efficient edge coupling. Exploiting its ultra-low loss, we have demonstrated unprecedented level of integration such as, a 40-channel array waveguide grating (AWG) based mux/de-mux, or a Faraday rotator based on silicon spirals, without employing any magneto-optic material. Now we reduced the propagation loss further, down to record-low 4 dB/m, by controlled annealing of waveguides in 100% pure H2 environment. In our optimized, MPW-compatible annealing process, the atomic mobility of Si smoothens the scallops from etching, without causing any structural deformation of the waveguides. This substantially reduced loss enabled us to develop ultra-high Q ring resonators on our thick-SOI platform, as well as sidewall smoothening for the active components, thereby making our platform a bedrock for the emerging applications such as, quantum computing, biosensors, and 3D imaging.

Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Fabrication of Si/Si1-Xgex Waveguide Wdm Components

Ultralow-loss tightly confining Si3N4 waveguides and high-Q microresonators

Ultra-low-loss High-Aspect-ratio Si3N4 Waveguides.

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit

Linear And Nonlinear Characterization Of Silicon/Silicon-Rich Nitride Hybrid Waveguides

Low-loss SiGe waveguides for mid-infrared photonics fabricated on 200 mm wafers

Ultra-low loss waveguide platform in silicon photonics

Characterization and Optimal Design of Silicon-Rich Nitride Nonlinear Waveguides for 2 Μm Wavelength Band

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Silicon Slot Waveguides With Low Transmission and Bending Losses at 1064 nm

Ultra-Low-Loss Silicon Waveguides Covering a Very Large Band

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Low Propagation Loss Ge-on-Si Waveguides and Their Dependency on Processing Methods

Low propagation loss silicon-on-sapphire waveguides for the mid-infrared

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

Silicon Nitride Waveguiding for Prospective Technologies at the 2 μm Waveband