Abstract:On-chip optical waveguides with low propagation losses and precisely engineered group velocity dispersion (GVD) are important to nonlinear photonic devices such as soliton microcombs. Yet, despite intensive research efforts, nonlinear integrated photonic platforms still feature propagation losses orders of magnitude higher than in standard optical fiber. The tight confinement and high index contrast of integrated waveguides make them highly susceptible to fabrication induced surface roughness. Therefore, microresonators with ultra-high Q factors are, to date, only attainable in polished bulk crystalline, or chemically etched silica based devices, that pose however challenges for full photonic integration. Here, we demonstrate the fabrication of silicon nitride ($\mathrm{Si_3N_4}$) waveguides with unprecedentedly smooth sidewalls and tight confinement with record low propagation losses. This is achieved by combining the photonic Damascene process with a novel reflow process, which reduces etching roughness, while sufficiently preserving dimensional accuracy. This leads to previously unattainable \emph{mean} microresonator Q factors larger than $5\times10^6$ for tightly confining waveguides with anomalous dispersion. Via systematic process step variation and two independent characterization techniques we differentiate the scattering and absorption loss contributions, and reveal metal impurity related absorption to be an important loss origin. Although such impurities are known to limit optical fibers, this is the first time they are identified, and play a tangible role, in absorption of integrated microresonators. Taken together, our work provides new insights in the origins of propagation losses in $\mathrm{Si_3N_4}$ waveguides and provides the technological basis for integrated nonlinear photonics in the ultra-high Q regime.

Ultra-low-loss High-Aspect-ratio Si3N4 Waveguides.

Ultralow-loss tightly confining Si3N4 waveguides and high-Q microresonators

Modeling and Fabrication of Ge-on-Si3N4 for Low Bend-Loss Waveguides

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Ultra-Low-Loss Silicon Waveguides Covering a Very Large Band

Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

Linear and Nonlinear Characterization of Silicon/Silicon-Rich Nitride Hybrid Waveguides

Low Propagation Loss Ge-on-Si Waveguides and Their Dependency on Processing Methods

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Optical Properties of A Silicon-Rich Nitride Ridge Waveguide at $2\ \boldsymbol{\mu}\mathbf{m}$ Wavelengths

Fabrication of Si/Si1-Xgex Waveguide Wdm Components

A Very Low Loss 220–325 GHz Silicon Micromachined Waveguide Technology

Suspended silicon waveguides for long-wave infrared wavelengths

High confinement, high yield Si3N4 waveguides for nonlinear optical application

Probing the loss origins of ultra-smooth $\mathrm{Si_3N_4}$ integrated photonic waveguides

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit

Silicon Nitride Waveguiding for Prospective Technologies at the 2 μm Waveband

Low loss hollow-core waveguide on a silicon substrate

Sub-micrometer-thick and Low-Loss Ge20Sb15Se65 Rib Waveguides for Nonlinear Optical Devices

High quality waveguides for the mid-infrared wavelength range in a silicon-on-sapphire platform