Effect of Buffer Layer on [00L] Texture and CMR of Sputtered La-Ca-Mn-O Thin Films on Silicon Substrate

Jau-Shiung Fang,Fang-Wen Tsai,Tsung-Shune Chin
DOI: https://doi.org/10.1109/intmag.2002.1001323
2004-01-01
Abstract:Summary form only given. This study aims at evaluating effect of buffer layer on the texture and CMR of La-Ca-Mn-O film sputtered on Si[100]. The buffer layers chosen are one of thermally grown SiO/sub 2/, or sputtered LaAlO/sub 3/ and/or LaNiO/sub 3/ and/or SiTiO/sub 3/ to replace expensive while less lattice mismatched single crystalline substrates LaAlO/sub 3/, LaNiO/sub 3/, and SrTiO/sub 3/.
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