Epitaxial Growth of LaMnO3 Buffer Layer by Magnetron Sputtering Method

Yuming LU,Xiangfa YAN,Feng FAN,Yu LIANG,Chuanyi BAI,Zhiyong LIU,Yanqun GUO,Hongyan ZHU,Xiaopeng FAN,Chuanbing CAI
DOI: https://doi.org/10.13380/j.cnki.chin.j.lowtemp.phys.2016.06.004
2016-01-01
Abstract:Highlyc-axis oriented LaMnO3 (LMO) cap layers have been deposited on Ion-Beam Assisted Deposition (IBAD)-MgO buffered hastelloy tapes by direct-current (DC)magnetron sputtering method with reel-to-reel system.The effects of LMO films epi-growth by substrate temperature,oxygen partial pressure,sputtering power and MgO textures are investigated in details.It is shown that MgO textures have a significant impact on the LMO films epi-growth.Finally,bi-axial textured LMO films with in-plane and out-of-plane FHWM about 7.5° and 2.8° are prepared.Subsequently YBCO films are well epitaxial grown on such LMO cap layer,with a Jc (77 K,self-field ) about 1.69 MA/cm2.
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