Preparation and Characterization of High Quality Micro/submicro Single Crystal Diamonds by Hot Filament CVD Method

ZHANG Tao,SHEN Bin,SUN Fang-hong,ZHANG Zhi-ming
DOI: https://doi.org/10.3969/j.issn.1006-852x.2011.06.002
2011-01-01
Abstract:High quality micro/submicro diamonds with euhedral diamond faces were prepared using hot filament chemical vapor deposition technique(HFCVD).The micro single crystal diamonds(1 μm)were deposited on the diamond seeds in the size of 1μm synthesized under high pressure and high temperature(HPHT).The photoresist solution with diamond seeds were dispersed uniformly on silicon wafers using a spin coater machine.After 2 hours deposition,the defects of the HPHT diamond seeds were eliminated.After 6 hours depositionn,the diamonds of 4 μm with well-defined morphology were obtained.Meanwhile,the submicron single crystal diamonds(1 μm) were directly deposited on silicon wafers.The crystal density and size were controlled by adjusting the deposition parameters,such as the pre-treatment method for substrate,bias current and deposition time.After 2 hours deposition,icosahedron crystals with size of 0.7 μm were successfully prepared.
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