Growth of Diamond Thin Films with Smooth Surface and High Transmittance on Quartz Glass Substrates

郝天亮,石成儒,韩高荣
DOI: https://doi.org/10.3969/j.issn.1672-7126.2004.04.011
2004-01-01
Abstract:Quartz glass substrates were pretreated in the slurry of diamond powder and acetone, the nucleation on these substrates was greatly enhanced. Under optimal conditions of pretreatment and hot filament chemical vapor deposition (HFCVD), nucleation densities higher than 1010 cm-2 were obtained. A four-step growth process in HFCVD was used, and compact, uniform diamond thin films with smooth surface (surface roughness <10 nm), 300 nm depth, grain size 100-150 nm high quality and high transmittance were successfully synthesized. The optical transmittance reached 74%-85% in the longer wave range 1-5 μm. The adhesion of diamond thin films on quartz glass substrates was good and there was no crack existed in these films.
What problem does this paper attempt to address?