Growth of Diamond Films on Si3n4 Coated Silicon Substrates

N Xu,ZH Zheng
DOI: https://doi.org/10.1179/mst.1996.12.1.1
IF: 1.8
1996-01-01
Materials Science and Technology
Abstract:Polycrystalline diamond films were deposited on to Si3N4 coated silicon substrates using thermal chemical vapour deposition. The defects on the amorphous Si3N4 layer played an essential role in diamond nucleation. After deposition, very few diamond crystallites were found on the untreated Si3N4 coating, while a diamond film had formed on the ultrasonic diamond powder treated Si3N4 coating. During the deposition process, the substrate temperature drastically affected the integrity of the intermediate Si3N4 layer. At a substrate temperature above 850 degrees C, the Si3N4 layer began to degrade. The lower CH4 concentration produced better diamond films in terms of crystallinity and purity. The adhesion of the diamond film to the Si3N4 coated silicon substrate and the friction coefficient between the diamond stylus and the diamond film decreased as the CH4 concentration increased. The corrosion resistance of the diamond film on the Si3N4 coated silicon substrate was much stronger than that of the Si3N4 film on the silicon substrate. (C) 1996 The institute of Materials.
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