Growth Characteristics of diamond films deposited on Si and W substrates

Fangqing Zhang,Wenjun Zhang,Yafei Zhang,Guanghua Chen,Q.J. Gao,Xuebin Jiang
DOI: https://doi.org/10.1088/1004-423X/2/1/007
1993-01-01
Acta Physica Sinica (Overseas Edition)
Abstract:Growth characteristics of diamond films synthesized by using a dc arc discharge plasma CVD were studied by means of XRD, SEM and reflection electron diffraction. The results showed that columnar growth of the diamond films was observed, the columns having an average diameter of about 15 μm, with sharp and regular base edges. Diamond grains grown on the substrate were initially of uniform polygons. An interfacial transition layer of polycrystalline SiC was observed between the diamond film and Si substrate. Diamond grains grown during the early-stage on W substrate were also uniform, and an interfacial transition layer of polycrystalline WC was observed between the diamond film and the substrate.
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