Influence of laser energy on the crystallization of Ge 2Sb 2Te 5 thin film prepared by pulsed laser deposition

Dazhi Hu,Fengming Pan,Xiaomei Lü,Jinsong Zhu
DOI: https://doi.org/10.1002/pssa.201127127
2011-01-01
Abstract:Four Ge2Sb2Te5 thin films were prepared by pulsed laser deposition (PLD) at 58, 100, 140, and 190?mJ/pulse laser energy, respectively. The influence of laser energy on the crystallization of Ge2Sb2Te5 was investigated. The result shows that laser energy has evident effect on the crystallization of Ge2Sb2Te5, including crystallization temperature, incubation time, Avrami coefficient, and grain size. The sample prepared at 140?mJ/pulse laser energy has the lowest crystallization temperature, the shortest incubation time, the largest Avrami coefficient, and the maximum mean grain size. The result of X-ray diffraction indicates that there are impurity-phase peaks in the pattern of the sample prepared at 190?mJ/pulse laser energy. A possible reason was given for these phenomenons.
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