Abstract:In this letter, we report on the realization of the p-type ZnO film by in situ nitrogen doping and subsequent thermal activation, as well as the discussions on the doping mechanism. Through the high temperature activation, a conversion of conductivity from n- to p-type with a hole concentration of ∼1019/cm3 has been observed by Hall measurements, accompanied with the formation and dissociation of N–H complex investigated by Raman spectra. These observations provide probability on the passivation effect of N–H complex and dehydrogenation process at high temperature, as confirmed by the variation of N and H atomic concentration in the secondary ion mass spectra. The dehydrogenation process in oxygen ambient at 900°C led to the dissociation of NO–H complexes, resulting in the formation of isolated NO acceptors and compensation to the intrinsic donor-like defects. The N-related acceptor bound exciton in photoluminescence with a small binding energy of 100meV and high p-type conductivity in activated ZnO:N film imply the important role of dehydrogenation effect to the realization of p-type ZnO.

Nitrogen doped ZnO thin films prepared by photo-assisted metal-organic chemical vapor deposition.

Hydrogen‐assisted Nitrogen‐acceptor Doping in ZnO

Roles of Hydrogen and Nitrogen in P-Type Doping of ZnO

Surface Morphology and Optical Properties of Na-doped ZnO Thin Films

Optical and Electrical Properties of N-doped ZnO and Fabrication of Thin-Film Transistors

Enhanced photo-induced hydrophilicity of the sol-gel-derived ZnO thin films by Na-doping

Nitrogen doped ZnO film grown by the plasma-assisted metal-organic chemical vapor deposition

Growth and Electric Characteristics of p-Type N-Doped ZnO Film by Metal-Organic Chemical Vapor Deposition

Properties of N-doped ZnO thin films in annealing process

Study on the Hall-effect and Photoluminescence of N-doped P-Type ZnO Thin Films

Synthesis and Properties of P-Type Nitrogen-Doped ZnO Thin Films by Pulsed Laser Ablation of a Zn-rich Zn3N2 Target

P-type ZnO:N Films Prepared by Thermal Oxidation of Zn 3 N 2

Structural, electrical and optical properties of N-doped ZnO films synthesized by SS-CVD

High Temperature Dehydrogenation for Realization of Nitrogen-Doped P-Type ZnO

Preparation and Characterization of Nitrogen-doped P-type MgxZn1-xO Film

Preparation and Characterization of N Doped P-type MgZnO Film

Optical properties of p-type ZnO doped by lithium and nitrogen

Growth and Characteristics of p-Type ZnO Films Doped with Al and N

Plasma-Free Nitrogen Doping and Homojunction Light-Emitting Diodes Based on Zno

Formation of p-type ZnMgO thin films by In–N codoping method

Nitrogen-doped ZnO nanorods prepared by hydrothermal diffusion