Abstract:A novel contactless conductivity detector with two electrodes integrated along the sidewalls of the ending separation channel of silicon-based electrophoresis microchip was presented in this paper,and factors influencing the response sensitivity of conductivity detection were discussed.Parameters of the detector were determined by MEMS analysis software and the equivalent circuit simulation,including electrode length of 550 μm,width of 15 μm,distance of 80 μm,thickness of insulation layer of 1 μm and conductivity detection frequency of 300 kHz.Silicon on insulator(SOI) was used in the fabrication process as the substrate to fabricate cross section micro channel and integrate conductivity detection electrodes.The technology of deep etching and isolation was used to isolate the detection electrodes from the micro channel,and the technology of ion diffusion was employed to fabricate tridimensional electrodes along the sidewalls of the ending separation channel,so that silicon-based electrophoresis microchip with integration of contactless conductivity detection electrodes was obtained.Under the excitation of sine wave with Vpp of 10 V and the operation frequency of 300 kHz,concentration gradient experiment for Na+ inorganic cation and electrophoresis separation detection for Na+ and Li+ hybrid inorganic cations were conducted.The results show that within the concentration range of Na+ from 1×10-9 mol/L to 1×10-4 mol/L,the conductivity response signal increases with the increase of Na+ concentration and the detection limit reaches 1×10-9 mol/L.The resolution of electrophoresis separation for Na+ and Li+ hybrid inorganic cations reaches 2.0,indicating that baseline separation is achieved.

A Three-Layer PMMA Electrophoresis Microchip with Pt Microelectrodes Insulated by a Thin Film for Contactless Conductivity Detection

A Polydimethylsiloxane Electrophoresis Microchip with a Thickness Controllable Insulating Layer for Capacitatively Coupled Contactless Conductivity Detection

Electrophoresis Microchips with Sharp Inlet Tips, for Contactless Conductivity Detection, Fabricated by In-Situ Surface Polymerization

Contactless Conductivity Detector for Capillary Electrophoresis Chip

A high-performance polycarbonate electrophoresis microchip with integrated three-electrode system for end-channel amperometric detection.

Monolithic integration of three-material microelectrodes for electrochemical detection on PMMA substrates

Study of Capillary Electrophoresis Chip with Conductivity Detection

Contactless Conductivity Detector Integrated in Silicon-Based Electrophoresis Microchip

A Glass/PDMS Hybrid Microfluidic Chip Embedded with Integrated Electrodes for Contactless Conductivity Detection

Fabrication of PMMA Nanofluidic Electrochemical Chips with Integrated Microelectrodes.

Poly(methyl Methacrylate) CE Microchips Replicated from Poly(dimethylsiloxane) Templates for the Determination of Cations

A Thin Cover Glass Chip for Contactless Conductivity Detection in Microchip Capillary Electrophoresis.

Fabrication of Pmma Microchip of Capillary Electrophoresis by Optimized Uv-Liga Process

Fabrication Of Polymethyl Methacrylate Electrophoresis Chips With Integrated Copper Electrodes

Carbon nanotube/poly(methyl methacrylate) (CNT/PMMA) composite electrode fabricated by in situ polymerization for microchip capillary electrophoresis.

Design of movable contactless conductivity detector for microchip capillary electrophoresis

Fabrication Method Based On Marginal Reinforcing And Improved High-Voltage Contactless Conductivity Detector For Poly(Dimethylsiloxane)/Glass Microchips

Rapid prototyping of polymeric electrophoresis microchips with integrated electrodes for contactless conductivity detection

A Sol-Gel-Modified Poly(Methyl Methacrylate) Electrophoresis Microchip with A Hydrophilic Channel Wall

Electrochemical Detector for Microchip Electrophoresis of Poly(dimethylsiloxane) with a Three-Dimensional Adjustor.

A New High-Speed Excimer Laser Micromachining Method for PMMA Based Capillary Electrophoresis Chip