Contactless Conductivity Detector Integrated in Silicon-Based Electrophoresis Microchip

GU Wen-wen,WEN Zhi-yu,WEN Zhong-quan,XU Yi,LIANG Feng-fei,LIU Hai-tao

DOI: https://doi.org/10.3969/j.issn.1672-6030.2010.04.015

2010-01-01

Nanotechnology and Precision Engineering

Abstract:A novel contactless conductivity detector with two electrodes integrated along the sidewalls of the ending separation channel of silicon-based electrophoresis microchip was presented in this paper,and factors influencing the response sensitivity of conductivity detection were discussed.Parameters of the detector were determined by MEMS analysis software and the equivalent circuit simulation,including electrode length of 550 μm,width of 15 μm,distance of 80 μm,thickness of insulation layer of 1 μm and conductivity detection frequency of 300 kHz.Silicon on insulator(SOI) was used in the fabrication process as the substrate to fabricate cross section micro channel and integrate conductivity detection electrodes.The technology of deep etching and isolation was used to isolate the detection electrodes from the micro channel,and the technology of ion diffusion was employed to fabricate tridimensional electrodes along the sidewalls of the ending separation channel,so that silicon-based electrophoresis microchip with integration of contactless conductivity detection electrodes was obtained.Under the excitation of sine wave with Vpp of 10 V and the operation frequency of 300 kHz,concentration gradient experiment for Na+ inorganic cation and electrophoresis separation detection for Na+ and Li+ hybrid inorganic cations were conducted.The results show that within the concentration range of Na+ from 1×10-9 mol/L to 1×10-4 mol/L,the conductivity response signal increases with the increase of Na+ concentration and the detection limit reaches 1×10-9 mol/L.The resolution of electrophoresis separation for Na+ and Li+ hybrid inorganic cations reaches 2.0,indicating that baseline separation is achieved.