Monolithic integration of three-material microelectrodes for electrochemical detection on PMMA substrates

Junshan Liu,Jun Qin,Jing Li,Dongyue Li,Zheng Xu,Xiaowei Zhang,Liqun Du,Chong Liu
DOI: https://doi.org/10.1016/j.elecom.2013.02.024
IF: 5.443
2013-01-01
Electrochemistry Communications
Abstract:Monolithic integration of three-material microelectrodes for electrochemical detection on poly (methyl methacrylate) (PMMA) substrates is presented. Au–Ag–Pt three-material electrodes were all fabricated based on polymer compatible photolithography processes, and the fabrication sequence of the electrodes was optimized. The C–Ag–Pt three-electrode system was also demonstrated. To reduce the electrical resistance, the carbon electrode was made on a silver intermediate layer which was simultaneously fabricated with Ag electrodes. A PMMA/poly(dimethylsiloxane) electrochemical sensing microchip with the Au–Ag–Pt three-electrode systems was constructed. The reproducibility of the three-electrode system from single and different microchips was characterized. The performance of the microchip was evaluated by two kinds of electrochemical probes (Ru(bpy)3Cl2 and dopamine).
What problem does this paper attempt to address?