Abstract:The nano/microelectromechanical system (N/MEMS) has triggered worldwide concern, and its applications have revolutionized technologies in various advanced fields from wearable sensors, 5 G communication technology, to energy harvesting, to aerospace. However, when the applied force is sufficiently large, the pull-in instability arises, and reliable operation is forbidden. Therefore, it is extremely important to insight fast and accurately into the periodic motion of the system to prevent the system from its pull-in motion. The basic aim of this study is to demonstrate the applicability of the well-known variational iteration method (VIM) for predicting the dynamic behavior of N/MEMS. For this, a nanobeam-based microstructure with van der Waals force for actuation is used as an example to reveal its periodic properties. The governing equation for the oscillation of the microsystem is obtained from the Euler-Bernoulli beam principle, considering the midplane stretching effect. We then employ the Galerkin technique to transform the governing partial differential equation into an ordinary differential equation, which is highly nonlinear, making it extremely difficult to solve by some traditional analytical methods, however, the VIM shows its ability to elucidate accurately the basic properties of the N/MEMS by simple calculation. This paper offers a new road for fast and accurate prediction of the microsystem's properties, and the result can be used for optimizing the N/MEMS.•A nanobeam-based N/MEMS system with van der Waals force is considered.•A strongly governing equation without a linear term is obtained.•The variational iteration method is applied to figure out the basic properties of the system.

Nonlinear Transient Analysis for Large-Scale Dynamics of Microelectromechanical Systems with the MOR-PIM Method

Macromodeling Of The Electrostatically Actuated Rectangle Plate Based On Modal Projection

Multi-physics Coupling Field Finite Element Analysis on Giant Magnetostrictive Materials Smart Component

Macro modeling method for electrostatic-drive silicon diaphragm

Transient Pull-In Analysis of Micro-Plate with Fluid-Structure Interactions

Rapid Nonlinear Analysis For Electrothermal Microgripper Using Reduced Order Model Based On Krylov Subspace

Rapid Nonlinear Analysis for Electrothermal Microgripper Using Reduced Order Model Based Krylov Subspace

Path following and numerical continuation methods for non-linear MEMS and NEMS

Studying nonlinear vibration analysis of nanoelectro-mechanical resonators via analytical computational method

Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical-systems

An iterative method for nonlinear dynamical system of an electrostatically actuated micro-cantilever

SNAP-THROUGH AND PULL-IN BEHAVIORS OF MEMS DEVICES WITH THE INITIAL CONFIGURATIONS

Passive Reduced-Order Macromodeling Algorithm for Microelectromechanical Systems

Variational Iteration Method for the Nanobeams-Based N/MEMS System

Nonlinear Forced Vibration For An Electromechanical Coupled Micro-Plate Simple Supported At Three Sides And Free At One Side

MEMS macromodel based on second- order Krylov Subspace Projection Method

Electromechanical Coupled Non-linear Dynamics for Micro Plate Simply Supported on Four Sides

MULTI-DISCIPLINARY CAD SYSTEM FOR MEMS

Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitations in MEMS

Modelling the Nonlinear Dynamics of Electrically Driven Impact Microactuators

Analysis of Thermo-Mechanical Coupling Damage Behavior in Long-Term Performance of Microelectromechanical Systems Actuators