Abstract:Non-linearities play an important role in micro- and nano- electromechanical system (MEMS and NEMS) design. In common electrostatic and magnetic actuators, the forces and voltages can depend in a non-linear way on position, charge, current and magnetic flux. Mechanical spring structures can cause additional non-linearities via material, geometrical and contact effects. For the design and operation of non-linear MEMS devices it is essential to be able to model and simulate such non-linearities. However, when there are many degrees of freedom, it becomes difficult to find all equilibrium solutions of the non-linear equations and to determine their stability. In these cases path following methods can be a powerful mathematical tool. In this paper we will show how path following methods can be used to determine the equilibria and stability of electromechanical devices. Based on the energy, work and the Hamiltonian of electromechanical systems (section 1), the equations of motion (section 2), the equilibrium (section 3) and stability conditions (section 6) are derived. Examples of path following simulations (section 4) in Mathematica (section 5), Matcont (section 7) and using FEM methods in Comsol (section 8) are given to illustrate the methods.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is how to effectively deal with nonlinear problems in micro - electro - mechanical systems (MEMS) and nano - electro - mechanical systems (NEMS). Specifically, the author focuses on how to model and simulate the nonlinear effects in these systems. In particular, when there are multiple degrees of freedom, it becomes very difficult to find all equilibrium solutions and determine their stability. For this purpose, the paper introduces path - following and numerical continuation methods as powerful mathematical tools for analyzing the equilibrium states and their stabilities of nonlinear electro - mechanical systems. ### Core problems of the paper 1. **Modeling and simulation of nonlinear effects**: In MEMS and NEMS designs, nonlinear effects (such as the nonlinear relationships between electric fields, magnetic field forces and positions, charges, currents and magnetic fluxes, as well as material, geometric and contact effects caused by mechanical spring structures) play an important role. Therefore, effective mathematical tools are required to model and simulate these nonlinear effects. 2. **Equilibrium solutions and stability of multi - degree - of - freedom systems**: When the system has multiple degrees of freedom, it becomes very complicated to find all equilibrium solutions and determine their stability. The path - following method can be used as a powerful tool to solve this problem. 3. **Derivation of energy and work expressions**: Based on the energy, work and Hamiltonian of the system, the equations of motion, equilibrium conditions and stability conditions are derived, and the applications of these methods are demonstrated through specific simulation examples. ### Formula summary - **Kinetic energy**: \[ U_{\text{kin}}=\int_V\frac{1}{2}\frac{p^2}{m}\rho_mdV = \frac{1}{2}\sum_i\frac{p_{m,i}^2}{m_i} \] - **Gravitational potential energy**: \[ U_{\text{grav}}=\int_V\frac{1}{2}V_G\rho_edV=\frac{1}{2}\sum_i\left(m_i\sum_jG\frac{r_{ij}}{m_j}\right) \] - **Magnetic energy**: \[ U_{\text{mag}}=\int_V\frac{1}{2}J\cdot AdV=\frac{1}{2}\sum_i\left(\Phi_i\sum_jL^{-1}_{ij}\Phi_j\right) \] - **Electric energy**: \[ U_{\text{el}}=\int_V\frac{1}{2}V\rho_edV=\frac{1}{2}\sum_i\left(Q_i\sum_jC^{-1}_{ij}Q_j\right) \] - **Strain energy**: \[ U_{\text{strain}}=\int_V\frac{1}{2}\varepsilon\cdot\sigma dV=\frac{1}{2}\sum_i\left(x_i\sum_{jk}k_{ij}x_j\right) \] ### Conclusion The paper shows that the path - following method can be used as a powerful mathematical tool to determine the equilibrium solutions and their stabilities of electro - mechanical systems. These methods can be applied not only to static systems, but also extended to periodic dynamic systems, thereby further enhancing their practicality as mathematical tools for analyzing electro - mechanical systems.

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