Rapid Nonlinear Analysis for Electrothermal Microgripper Using Reduced Order Model Based Krylov Subspace

Lu Guan,Jinkui Chu,Daidi Qi,Hao Xia,X Wang
DOI: https://doi.org/10.1088/1742-6596/96/1/012195
2008-01-01
Journal of Physics Conference Series
Abstract:The conventional numerical analysis methods could not perform the rapid system-level simulation to MEMS especially when containing sensing and testing integrated circuit. Using reduced-order model can simulate the behavior characteristic of multiphysical energy domain models including nonlinear analysis. This paper set up the reduced-order model of electrothermal microgripper using Krylov subspace projection method. The system functions were assembled through finite element analysis using Ansys. We took the structure-electro-thermal analysis to microgripper finite element model and reduced model order through second-order Krylov subspace projection method based on Arnoldi process. The simulation result from electrothermal reduced order model of microgripper is accurate compared with finite element analysis and even more has a few computing consuming.
What problem does this paper attempt to address?