A REDUCED ORDER MODELING OF NONLINEAR ELECTROSTATIC-MECHANICAL SYSTEMS BASED ON THE ENERGY IDENTIFICATION APPROACH

Xiezhao Lin,Ji Ying,Zichen Chen
2010-01-01
Abstract:To build the reduced order model(ROM) of an electrostatically actuated micro-plate device,a system identification modeling based on the energy identification approach is proposed.The kinetic energy,strain energy and capacitance of the nonlinear system are written as the multivariate polynomial functions of the structural modals.The unknown coefficients of these polynomials are fitted using the least squares from a set of steady state,high-fidelity,nonlinear finite element models.The resulting strain energy and capacitance expressions can be used to develop the ROM.The simulation with the ROM is with a much lower computational cost,and the calculating results agree very well with those from high-fidelity finite element model under various electric loads,and thus,the modeling approach in this paper has been validated.
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