Abstract:With the widespread application and diversified demands of micro electro mechanical systems(MEMS),it is difficult to meet the design requirements of non-standard for the current design method of structure combination in the parametric elements library.Therefore,a method of mapping extraction and equivalent approximation of multi-granularity macro-model which supports non-standard structure design is presented.In the MEMS design level and flow of multi-granularity macro-modeling,the global matrix which describes the system is extracted through association and combination of nodes of complete finite element model of the MEMS device.The precise system model based on the low-order ordinary differential equations is then achieved.The large-scale sparse symmetric matrix is saved via one-dimensional variable bandwidth storage.The equivalent approximation model is obtained by Lagrange polynomial fitting and generalized minimal residuals.The fidelity relationships between the input and output of the system of the non-standard structure are built to connect the models of connector level and system level.The product continuous is finally realized via design iteration.The independent prototype system using ACIS as geometry modeling kernel is developed to verify the proposed method by a digital light procession micro-mirror.The test results prove that the present design ability is extended from limited simple devices in element library to the complex,strange,non-standard structure.It has important significance to improve efficiency and quality of the design of MEMS.

Macromodel extraction for MEMS devices based on model order reduction

Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

Design Method of Non-standard Structure for MEMS Based on Multi-granularity Macro-modeling

Macromodeling Of The Electrostatically Actuated Rectangle Plate Based On Modal Projection

Macromodeling of the electrostatically actuated circular plate based on mode superposition method

Macromodeling of Electrostatically Actuated Circular Plate Based on mode analysis

Macro modeling method for electrostatic-drive silicon diaphragm

A REDUCED ORDER MODELING OF NONLINEAR ELECTROSTATIC-MECHANICAL SYSTEMS BASED ON THE ENERGY IDENTIFICATION APPROACH

Research for Extraction Method of Mems Devices Macro-Model

A New Modeling Method of MEMS System's Noise

Modeling and Simulation Technology of Complex Mechanical Systems

Passive Reduced-Order Macromodeling Algorithm for Microelectromechanical Systems

An Efficient Macromodel Extraction Strategy for Packaged MEMS Thermal Wind Sensor Considering Multiphysics

Macromodeling method of fluid-structure interacting mems based on modal analysis and proper orthogonal decomposition

Layout Extraction and System-Level Modeling Automatically for MEMS Device

An efficient finite element solution using a congruent transformation based model order reduction for interconnect simulation

Geometrical Modeling for Mask Refinement of Surface Micromachined MEMS Devices

A Broadband Enhanced Structure-Preserving Reduced-Order Interconnect Macromodeling Method for Large-Scale Equation Sets of Transient Interconnect Circuit Problems

Systematic Direct Solid Modeling Approach for Surface Micromachined Mems

On Symbolic Model Order Reduction

MORCIC: Model Order Reduction Techniques for Electromagnetic Models of Integrated Circuits