Abstract:Micro-scale effect and multi-field coupling are characteristics of the design of micro-electro-mechanical system (MEMS). However, the current macroscopic structure-oriented CAD systems have not been able to meet the increasing requirements for the design in micrometer scale. Therefore, a flexible design modeling methodology for MEMS based on Petri net is put forward. Firstly, the highly cohesive and low coupling modules are obtained via refining and abstracting the existing CAD systems on the basis of analyzing the design characteristics, framework and process of MEMS. Secondly, the flexible design modeling framework for MEMS based on Petri net is built by associating the Petri net with the modules of the design system. Then, the forward-position places and weighted directed arcs are added to regulate the maximum and minimum tokens of the places to control the number of design flow. Afterwards, the control places are added to format control loops and make concurrent transitions occur orderly to solve the conflicts in concurrent design. Finally, the modules are controlled to operate with the state space results of Petri net. The multiple relationships between the complex design flows are then realized. An independent prototype system using ACIS as geometry modeling kernel has been developed to validate the proposed method with the design of capacitive 3D silicon micro comb drive. The test results proved that the present design methods are extended from top-down, bottom-up and hybrid to flexible design based on Petri net. The product design is no longer restricted to fixed process. It has important significance to improve efficiency and quality of the design of MEMS.

Layout Extraction and System-Level Modeling Automatically for MEMS Device

Design Method of Non-standard Structure for MEMS Based on Multi-granularity Macro-modeling

Flexible Design Modeling Methodology for MEMS Based on Petri Net

Macromodel extraction for MEMS devices based on model order reduction

Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

Product Layout Design Based on Position Graph and Performance Fusion Model

The Terminal Behaviors Modeling Method for Complex Microsystems

System-level modeling research of MEMS based on SABER platform

Macromodeling Of The Electrostatically Actuated Rectangle Plate Based On Modal Projection

Macro modeling method for electrostatic-drive silicon diaphragm

A New Modeling Method of MEMS System's Noise

Systematic Direct Solid Modeling Approach for Surface Micromachined Mems

Automated Generation of Layered Model for Surface Micro-machined MEMS

Feature-Based Process Layer Modeling for Surface Micromachined Mems

A Key Algorithm for MEMS Process Geometrical Simulation Based on ACIS

Development of solid-based modeling system for surface micromachined MEMS

Layout-Based 3D Solid Modeling of IC Structures and Interconnects Including Electrical Parameter Extraction

Integrated Methodology and Key Techniques for MEMS Design

Structural Element Library Based Conceptual Design Methodology of MEMS

A Novel Transfer Method from 3D Model to 2D Mask Layout

Solid-based CAPP for surface micromachined MEMS devices