Layout-Based 3D Solid Modeling of IC Structures and Interconnects Including Electrical Parameter Extraction

Xiaoning Qi,Sherry Y. Shen,Ze-Kai Hsiau,Zhiping Yu,Robert Dutton
DOI: https://doi.org/10.1007/978-3-7091-6827-1_18
1998-01-01
Abstract:A suite of software tools have been developed to model IC structures including interconnects based on layout design and processing information. The model­ ing capabilities include 3D rendering of solid objects, surface meshing, electrical parameter (mainly capacitance) extraction for arbitrarily shaped objects. This software ensemble provides a direct link between design parameters and electri­ cal performance. Analysis of a four transistor SRAM cell is used as an example.
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