A Novel Transfer Method from 3D Model to 2D Mask Layout

Jian Xie
2006-01-01
Abstract:Based on the study of the format of a sub-standard 3D solid model file(SAT format), we presented a transfer method for the 3D solid models to standard CAD-layouts. The corresponding transfer interface was developed in VC++ language. The validity of the transfer method was validated by using a kind of typical MEMS device-micro-machined accelerometer. The result showed that the transfer method is feasible.
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