Automated Generation of Layered Model for Surface Micro-machined MEMS

李建华,高曙明,刘玉生
DOI: https://doi.org/10.1080/16864360.2004.10738252
2003-01-01
Computer Integrated Manufacturing Systems
Abstract:One problem with traditional MEMS design methodology is that it is not a structured method. In this paper, a method for automatically generating the layered model from its geometric model is proposed as the basis of the structured MEMS design. The method is mainly composed of two parts: definition and automated recognition of the process features for surface micro-machined MEMS; automated generation of the layered model based on the recognized process features. The method aims at enabling designers to concentrate on the creative design activity without considering the tedious fabrication process.
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