Abstract:This paper proposes a new method, a Self-adaptive Mathematical Expression Model (SMEM), to describe volumetric errors of machine tools based on Non-Uniform Rational B-Spline (NURBS). The NURBS parameters of expression model were optimized by an improved Genetic Algorithm (GA). Simulation method was adopted to verify the effectiveness of the parameter optimization method of the SMEM, and the measurement experiment and machining experiment with error compensation based on the SMEM were conducted on a five-axis machining center with a titling rotary table. It was found that the SMEM can be used to uniformly express the position-dependant error parameters. Compared with the traditional methods, which adopt largely discrete database tables or polynomial method, the presented method is more concise, accurate and robust. In addition, volumetric errors of any position among the workspace of the machine tools can be quickly obtained by searching the SMEM of error parameters. And volumetric error of tool paths and the actual surface of the machining parts also can be expressed by the SMEM. The accuracy of the linear measured paths can have a great improvement of 70.63% with error compensation based on the SMEM. The accuracy of the part's predicted machining precision using the SMEM was 76.34%, and the surface profile error of the part can be improved significantly, up to 61.29%, when the SMEM was used for error compensation. Therefore, the expression model established in this study is feasible and robust, and could be used to express error parameters and volumetric errors. Moreover, it could be used to predict machining precision of part before machining and provide the basis for error compensation.

Local Variation for 3D Geometric Model of Surface Micromachined MEMS Devices

Design Method of Non-standard Structure for MEMS Based on Multi-granularity Macro-modeling

Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

Multi-orientation Optimization of Complex Parts Based on Model Segmentation in Additive Manufacturing

Geometrical Modeling for Mask Refinement of Surface Micromachined MEMS Devices

Systematic Direct Solid Modeling Approach for Surface Micromachined Mems

A Mems Electro-Mechanical Co-Optimization Platform Featuring Freeform Geometry Optimization Based on a Genetic Algorithm

Design of Freeform Geometries in a MEMS Accelerometer with a Mechanical Motion Preamplifier Based on a Genetic Algorithm

Assembly Variation Analysis of Flexible Curved Surfaces Based on Bézier Curves

Assembly Accuracy Analysis for Small Components with A Planar Surface in Large-Scale Metrology

Macro modeling method for electrostatic-drive silicon diaphragm

Variation analysis driven by small-sample data for compliant aero-structure assembly

Manufacturability Evaluation of Layer Model for Surface Micro-Machined MEMS

Mask Synthesis and Verification Based on Geometric Model for Surface Micro-Machined MEMS

Geometrical Simulation of Multiscale Toleranced Surface with Consideration of the Tolerancing Principle

Automated Generation of Layered Model for Surface Micro-machined MEMS

Manufacturing Error Modeling Based on Homogeneous Transformation

Feature-Based Process Layer Modeling for Surface Micromachined Mems

A Uniform Expression Model for Volumetric Errors of Machine Tools

Geometry Simulation and Evaluation of the Surface Topography in Five-Axis Ball-End Milling

Development of solid-based modeling system for surface micromachined MEMS