An Electro-Mechanical Co-Optimization Platform for MEMS Devices with Freeform Geometry Based on a Genetic Algorithm
Chen Wang,Xinyu Wu,Sina Sadeghpour,Milad Shojaeian,Linlin Wang,Aojie Quan,Yangyang Guan,Huafeng LIU,Yuan Wang,Pan Zhang,Rui P. Martins,Pui-In Mak
DOI: https://doi.org/10.21203/rs.3.rs-4792905/v1
2024-01-01
Abstract:This paper describes a novel, system-level design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can concurrently design and co-optimize the electronic and mechanical part of a MEMS device comprising freeform geometries to achieve a better system performance, i.e., higher sensitivity, better system stability and larger fabrication tolerances. Also, the introduction of freeform geometries allows higher degrees of freedom in the design process, improving the diversity and potentially the performance of the MEMS devices. A MEMS accelerometer comprising a freeform mechanical motion preamplifier in a closed-loop control system is presented to demonstrate the effectiveness of the design approach. The optimization process shows the main figure-of-merit (FOM) is improved by 482%. For the mechanical part, there is an improvement of the product of sensitivity and bandwidth by 151 %, and by 276 % for sensitivity. For closed-loop performance, there is an improvement of 120% for the ratio of open and closed-loop displacements. Excellent immunities to fabrication errors and parameter mismatch are achieved. Experiments show that the displacement of the MEMS accelerometer in the closed-loop system is decreased by 86 % with 4.85 V feedback voltage compared with that in the open-loop system under a 1g 100 Hz acceleration input. The static and dynamic nonlinearity in the closed-loop system is improved by 64 % and 61 %, respectively, compared with those in the open-loop, in the ±1 g acceleration input range. Besides, the closed-loop system improves the cross-axis sensitivity by 18.43%, compared with that in the open-loop. It is the first time, a closed-loop system for a MEMS accelerometer comprising a mechanical motion preamplifier is successfully implemented experimentally.