Macromodeling of Electrostatically Actuated Circular Plate Based on mode analysis

Xie-Zhao LIN,Ji YING
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.014
2006-01-01
Abstract:For investigate the quasi-state and dynamic characterization of an electrically actuated circular plate, a method for generating a reduced order model (ROM or macro-model) is presented, which is based on mode analysis. The ROM is represented as an analytical function in the term of a set of mode coordinates. After a set of finite element analysis running is completed, a nonlinear function fitting scheme will be used for constructing an analytical model of kinetic energy, strain energy and electrostatic co-energy. Then the generalized equations of motion are used for the electrically actuated circular plate quasi-state and dynamic behaviors simulation. The calculated results show that this macromodeling method can consider the effect of residual stress, and the resulting ROM can capture the dynamic behaviors of the circulate plate very well.
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