Rapid Nonlinear Analysis For Electrothermal Microgripper Using Reduced Order Model Based On Krylov Subspace

Jinkui Chu,Le Guan,DongZhou Qi,Xiuchun Hao
DOI: https://doi.org/10.1088/1742-6596/96/1/012195
2008-01-01
Abstract:The conventional numerical analysis methods could not perform the rapid system-level simulation to MEMS especially when it containing sensing and testing integrated circuit. The behavior characteristic of multiphysical energy domain models including nonlinear analysis can be simulated by using reduced-order model. This paper set up the reduced-order model of electrothermal microgripper using Krylov subspace projection method. The system functions were assembled through finite element analysis using Ansys. We took the structure-electro-thermal analysis to microgripper finite element model and reduced finite element functions order through second-order Krylov subspace. projection method based on Arnoldi process. The simulation result from electrothermal reduced order model of microgripper is accurately compared with finite element analysis and even more needs a few computing consuming.
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