Electromechanical Coupled Non-linear Dynamics for Micro Plate Simply Supported on Four Sides

Sun Libo,Xu Lizhong
DOI: https://doi.org/10.2991/mems.2012.138
2012-01-01
Abstract:Dynamic characteristic of the micro plate under the micro scale effect shows non-linear features, traditional linear analysis methods can not satisfy the design precision of MEMS system, and non-linear dynamics analysis method provides an effective solution.In this paper, based on the small deflection theory and electrostatics theory, take typical boundary condition of the micro plate simply supported on four sides as example, the basic differential equation of lateral vibration is established, using Linz Ted-Poincare method, displacement and time course of forced vibration, time responses of forced vibration are calculated.The research results provide theoretical basis for optimizing the system parameters, improving the ability to resist interferences and increases the reliability.
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