Dynamic Electromechanical Response Of Piezoelectric Laminated Micro Plates Based On Couple Stress Theory

Xin Kang,Dingguo Zhang,Wei Sun
2011-01-01
Abstract:This study presents the dynamic electromechanical response of a piezoelectric laminated micro plate under the excitation of ultrasonic wave. The laminated plate consists of a piezoelectric layer (AlN), an elastic layer (SiO2) and two electrode layers (Au and Pt). Since the whole thickness of the plate is in micro scale, the size dependence of the dynamic behavior of the plate is evaluated using the couple stress theory. The results show that the bending rigidity of the micro plate increases when the size effect is considered and the amplitude of output of electric charge and voltage are reduced accordingly when the plate is excited by ultrasonic wave. Also the resonant frequency of the laminated plate increase because of the change of the bending rigidity of the plate. The analysis results can provide a reference for the design of micromachined piezoelectric sensors.
What problem does this paper attempt to address?