Analysis on Shock Resistance of Micromachined Angular Rate Sensor Based on Convection Heat Transfer

Ying ZHAO,Rong ZHU,Xiong-ying YE,Yong-jun YANG

DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.04.024

2008-01-01

Abstract:Micromachined thermal gas angular rate sensor is kind of novel inertial device, which takes an advantage of high shock resistance due to use gas instead of conventionally used proof-mass as the key sensing element. The calculation of the static and transient strain and stress in supporting layer of heating wire and detection wires is performed, and the position with the largest stress is figured out by means of finite element software ANSYS. The results show that the largest stress point of support layer of heating wire is close to the clamped edges. The largest stress point of support layer of detection wire is close to the clamped edges and corners. When an acceleration loading is applied along z direction, the largest stress of support layer of heating wire is larger than that of support layer of detection wire. Experimental results show that our device can withstand the shock of 21 200 gn, and the theoretic prediction of the shock resistance of the device can reach 200 000 g n, all of which indicates the sensor has a good shock resistance.