Abstract:The rapid advancement of micro-nano machining technology has led to a decrease in the dimensions of microdevices and microchips, following the principles of Moore's law. In addition to conventional semiconductor materials like silicon, emerging nanoscale materials such as nanowires, nanotubes, and two-dimensional materials are being considered as promising alternative constituent materials. The mechanical properties of these materials have a significant impact on the performance and service life of these microdevices and microchips. However, conventional mechanical testing methods have difficulty in accurately measuring the properties of these materials at the nanoscale due to limitations in displacement control and microforce sensing. Consequently, there is an urgent need to develop a micromechanical device capable of testing nanoscale solid materials. In this study, we propose a concept based on high-resolution image sequences for the design of an integrated micromechanical device capable of synchronously measuring the force and deformation of tested specimens. The device has been fabricated using ultrafast femtosecond laser etching technology, which offers an efficient and cost-effective approach for manufacturing microstructures and is suitable for processing various materials such as metals and nonmetals. The stiffness of the device plays a crucial role in the design of the micromechanical device, and a stiffness-matching criterion is introduced to ensure appropriate design parameters. The fabricated device is employed to conduct in-situ tension experiments on SiC nanowires and multilayer molybdenum disulfide nanosheet within a scanning electronic microscope, enabling accurate measurement of their strength, modulus, and fracture strain.

A Thermal Actuated Bistable Structure for Generating On-Chip Shock Loads

An On-Chip Bistable Structure for Extracting the Impact Fracture Strength of the Microstructure

On-Chip Generation Method of Shock Load and Characterization of Microstructure Shock Process

Harnessing Snap-Through Instability in Soft Dielectrics to Achieve Giant Voltage-Triggered Deformation

Mechanical Latching Stops for Reliability Improvement of MEMS in Shock Environments

Micromachined Integrated Shock Protection Via A Self-Adaptive Nonlinear System

Micro-cantilever Shocking-Acceleration Switches with Threshold Adjusting and ‘On’-State Latching Functions

Recent Efforts in Modelling Combined Rate, Size and Thermal Effects on Single Crystal Strength

Micromachined integrated self-adaptive nonlinear stops for mechanical shock protection of MEMS

The Response of Electrostatic MEMS Structure under Mechanical Shock and Electrostatic Forces

Design and Simulation of Micro-Platform for MEMS Devices Applied in Shock Environment.

A Thermal Actuated Test Platform for in Situ Evaluating the Tensile Fracture Strength of Micro-Structures

A Dual-Parameter On-Chip Test Platform Based on Thermal Actuator for Testing Fracture Strength of Microstructure

Micro-Fabricated bi-stable Mechanical Switch Actuated by a Single Thermal Actuator

Shock resistance of MEMS capacitive accelerometers

A Novel Shock Protection Method Based On Mems Compliant Latching Stopper

Giant-Amplitude, High-Work Density Microactuators with Phase Transition Activated Nanolayer Bimorphs

Experimental Investigation of a Thermally Responsive Actuator Based on Metallic Molybdenum Disulfide: A Conceptual Analysis

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment

Magneto-sensitive bistable soft actuators: Experiments, simulations, and applications

A Novel Impact Tester for in Situ Evaluating the Shock Reliability of Micro-Structures