Abstract:Impact is the most important factor affecting the reliability of Micro-Electro-Mechanical System (MEMS) gyroscopes, therefore corresponding reliability design is very essential. This paper proposes a shock-protected structure (SPS) capable of withstanding a full temperature range from ‚ąí40 ¬įC to 80 ¬įC to enhance the shock resistance of MEMS gyroscopes. Firstly, the shock transfer functions of the gyroscope and the SPS are derived using Single Degree-of-Freedom and Two Degree-of-Freedom models. The U-folded beam stiffness and maximum positive stress are deduced to evaluate the shock resistance of the silicon beam. Subsequently, the frequency responses of acceleration of the gyroscope and the SPS are simulated and analyzed in Matlab utilizing the theoretical models. Simulation results demonstrate that when the first-order natural frequency of the SPS is approximately one-fourth of the gyroscope's resonant frequency, the impact protection effect is best, and the SPS does not affect the original performance of the gyroscope. The acceleration peak of the MEMS gyroscope is reduced by approximately 23.5 dB when equipped with the SPS in comparison to its counterpart without the SPS. The anti-shock capability of the gyroscope with the SPS is enhanced by approximately 13 times over the full-temperature range. After the shock tests under the worst case, the gyroscope without the SPS experiences a beam fracture failure, while the performance of the gyroscope with the SPS remains normal, validating the effectiveness of the SPS in improving the shock reliability of MEMS gyroscopes.

Micromachined Integrated Shock Protection Via A Self-Adaptive Nonlinear System

Micromachined integrated self-adaptive nonlinear stops for mechanical shock protection of MEMS

Design and Simulation of Micro-Platform for MEMS Devices Applied in Shock Environment.

A Novel Shock Protection Method Based On Mems Compliant Latching Stopper

Mechanical Latching Stops for Reliability Improvement of MEMS in Shock Environments

Silicon-nanoforest-based solvent-free micro-supercapacitors with ultrahigh spatial resolution <i>via</i> IC-compatible <i>in situ</i> fabrication for on-chip energy storage

Response and Performance of A Nonlinear Vibration Isolator with High-Static-Low-Dynamic-Stiffness under Shock Excitations

Flexible Stop and Double-Cascaded Stop to Improve Shock Reliability of Mems Accelerometer

Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Shock resistance of MEMS capacitive accelerometers

On-Chip Generation Method of Shock Load and Characterization of Microstructure Shock Process

Mechanically resilient, alumina-reinforced carbon nanotube arrays for in-plane shock absorption in micromechanical devices

A Thermal Actuated Bistable Structure for Generating On-Chip Shock Loads

On Chip Electrostatic Discharge Protection for MEMS Gas Sensor System

Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control

Research on Multiphysics-Driven MEMS Safety and Arming Devices

A novel multi-direction high shock reliability test on MEMS devices

2 MEMS ACCELEROMETERS AND SHOCK EXPERIMENTS 2 . 1 MEMS Accelerometers

Optimized shock-protecting microstructures

Experimental analysis of MEMS capacitive accelerometer's shock resistibility

A silicon micromachined high-shock accelerometer with a bonded hinge structure