Electrical characteristic of AlGaN/AlN/GaN Schottky diode

Xinhua Wang,Xiaoliang Wang,Hongling Xiao,Cuimei Wang,Junxue Ran,Weijun Luo,BaoZhu Wang,Chun Feng,Cuibai Yang,ZhiYong Ma,Guoxin Hu,Yiping Zeng,Jinmin Li
2007-01-01
Abstract:The electrical character of AlGaN/AlN/GaN heterostructure Schottky diode is investigated. The specific contact resistance is as low as 7.48 × 10-4 Ω/cm2. The diode shows good rectifier character. Through the forward current of the diode, the schottky barrier height and ideality factor are calculated to be 0.57 eV and 4.83, respectively. After annealed at 300°C, the electrical performance of the device is improved.
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