Arrays of Vacuum Microdiodes Using Uniform Diamondlike-Carbon Tip Apexes

J. C. She,H. Hao,N. S. Xu,S. Z. Deng,J. Chen,S. E. Huq,L. Wang

DOI: https://doi.org/10.1063/1.2402940

IF: 4

2006-01-01

Applied Physics Letters

Abstract:The authors report the fabrication and characterization of vacuum microdiode arrays using Si microtip with uniform diamondlike-carbon (DLC) apexes. The technique is based on the mass production procedure of integrated circuit devices. The typical turn-on voltage of the microdiode arrays is 50V, and it can provide emission current density up to 0.24A∕cm2 at 210V. The developed diodes with coated apexes considerably surpass the diodes with virgin Si tip (98V∕0.058A∕cm2) in their performance. Thus, the microdiode with DLC coatings on Si tip apexes are attractive for applications in charge neutralizers and microwave amplifiers. The underlying physics responsible for the device operation is discussed.