Field Electron Emission of Si Nanotips with Apexes of Various Compositions

JC She,K Zhao,SZ Deng,J Chen,NS Xu
DOI: https://doi.org/10.1063/1.2001733
IF: 4
2005-01-01
Applied Physics Letters
Abstract:We report procedure with use of self-assembled silicon carbide (SiC) nanomasks for preparation of ultrahigh-density Si nanotips. Si nanotips with SiC apex may be firstly prepared in a CH4∕H2 plasma treatment and in a subsequent H2 plasma etching a SiC apex may be converted into an amorphous silicon (a-Si) one with an additional function of sharpening the nanotips. A comparative study of the field electron emission from the Si nanotips with apexes of SiC, a-Si and pure Si is carried out, and shows that nanotips with a-Si apexes have not only the highest field enhancement factor but also the best emission uniformity. The physical origins for the above two improvements in field emission are discussed.
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