Amorphous Selenium Based Photodetector Driven by Field Emission Current from N-doped Diamond Cold Cathode
N Kato,L Saito,H Yamaguchi,H Okamura,K Okano,T Yamada,T Butler,NL Rupesinghe,GAJ Amaratunga
DOI: https://doi.org/10.1116/1.2185652
2006-01-01
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Abstract:Operation of prototype photodetector using a-Se based target and diamond cold cathode is investigated. In our previous study, successful operation of the prototype photodetector as a unit pixel in future imaging device was reported. Clear photoresponse was obtained even at 10−5Torr, several orders of magnitude higher than the pressure used for conventional imaging tube devices. Electron emission characteristics of diamond are widely reported, but the precise fabrication process of a-Se based target film is covered with patents. In this study, we have fabricated following three types of target films: (A) a-Se film without incorporation, (B) a-Se film with incorporation of arsenic (As), and (C) a-Se film with incorporation of As and tellurium (Te). Successful operation of the photodetector driven by diamond cathode with target C was observed. The detector showed clear response to red, green, and blue light-emitting diodes in addition to white halogen light.