Structural characterization and Coulomb blockade of a-SiN x / nanocrystalline Si /a-SiN x asymmetric double-barrier structures

L. C. Wu,M. Dai,X. F. Huang,P. G. Han,L. W. Yu,H. C. Zou,W. Li,K. J. Chen
DOI: https://doi.org/10.1557/proc-832-f3.6
2005-01-01
Abstract:We have fabricated a series of a-SiN x /nc-Si/a-SiN x double-barrier structural samples by plasma-enhanced chemical vapor deposition (PECVD) and subsequent thermal annealing technique. The micro-structural properties of the samples were studied by using Raman scattering spectroscopy, planar and cross-section transmission electron microscopy (TEM). The electrical properties of the samples were investigated by frequency dependence of capacitance voltage (C-V) measurements. Charging effect in the nc-Si was exhibited through the hysteresis phenomena of the C-V curve and explained by F-N tunneling. For the thicker SiN x barrier layer samples, Coulomb blockade effect was observed in C-V curve for the sample with thinner SiN x barrier layer, in which two capacitance peaks appeared, and explained by direct tunneling of electrons into the nc-Si through the tunneling SiN x layers. From the interval between the two peaks, the Coulomb charging energy of nc-Si dot was estimated.
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