Charging and Coulomb Blockade Effects of the Nc-Si Embedded in SiNx Double-Barrier Structures

Xinfan Huang,Liangcai Wu,Min Dai,Peigao Han,Linwei Yu,Zhongyuan Ma,Yansong Liu,Wei Li,Kunji Chen
DOI: https://doi.org/10.1016/j.jnoncrysol.2005.11.097
IF: 4.458
2006-01-01
Journal of Non-Crystalline Solids
Abstract:We fabricated a series of a-SiNx/nc-Si/a-SiNx double-barrier structures by plasma-enhanced chemical vapor deposition and subsequent thermal annealing technique. The photographs of transmission electron microscopy show that the nc-Si layer has been formed. The estimated density of nc-Si dots is of the order of 1011–1012cm−2. In the C–V measurements, for the samples with thicker SiNx layer (30nm), we observed C–V hysteresis characteristics, which can be explained by charging effect in nc-Si through the F–N tunneling mechanism; while for the sample with thinner SiNx layer (5nm), the C–V curves show the peak structures which can be attributed to the resonant tunneling of electrons into nc-Si controlled by Coulomb blockade effect. From the interval bias voltage between the two peaks, the Coulomb charging energy of nc-Si dot was estimated.
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