Fabrication of Si3N4 micro-components by a combined microfabrication process

Jing Li,Songzhe Jin,Yong Li.
DOI: https://doi.org/10.4028/0-87849-965-2.28
2005-01-01
Key Engineering Materials
Abstract:Si-based high-temperature ceramics are attractive materials for power microelectromechanical systems (power MEMS), such as microscale gas turbines, micro-combustors and micro-reactors. This presentation introduces a novel process for the microfabrication of Si3N4 ceramics, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si preforms and reaction sintering of the micromachined Si preforms. The present process has its high potential for Si3N 4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of S3N4 reaction sintering. Si3N4 micro-components such as micro nozzle arrays and micro-rotor were fabricated by using the present process.
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