Manufacturing Silicon Carbide Microrotors by Reactive Hot Isostatic Pressing within Micromachined Silicon Molds

Jing‐Feng Li,Shinya Sugimoto,Shuji Tanaka,Masayoshi Esashi,Ryuzo Watanabe,Jing-Feng Li
DOI: https://doi.org/10.1111/j.1151-2916.2002.tb00077.x
IF: 4.186
2004-12-20
Journal of the American Ceramic Society
Abstract:A novel ceramic microfabrication process—based on the idea of silicon carbide (SiC) reaction sintering within a micromachined silicon mold—has been developed to produce a SiC microroter for miniaturized gas turbines. The new process involves the micromachining of silicon molds; filling the molds with powder mixtures of α‐SiC, graphite, and phenol resin; bonding the molds with an adhesive; reaction sintering by hot isostatic pressing (HIP); and the releasing of a reaction‐sintered workpiece from the mold by wet etching. Using this process, we have successfully fabricated SiC microrotors with a diameter of 5 mm, whose complicated geometry was well transferred from the negative shape of the micromachined silicon mold. The reaction‐HIPed SiC ceramics within Si molds showed reasonably good mechanical properties, which are comparable to those of the commercialized reaction‐sintered SiC ceramics.
materials science, ceramics
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