Abstract:This experimental work focuses on the design and fabrication of a basic module for integrated thermoelectric devices based on a large number of interconnected monocrystalline silicon nanobeams, very tall (>1 μm) and thin (less than 200 nanometers). The proposed structure shows high mechanical stability and very good values of deliverable power per unit area. The strong reduction of thermal conductivity with respect to bulk silicon makes nanostructured silicon one of the best materials for highly efficient direct conversion of heat into electrical power and vice‐versa. The widespread technologies for the integration of silicon devices can be used to define on‐chip micro thermoelectric generators (scavengers); similar structures could also be used for precise and well‐localized cooling through the reverse process of heat pumping. However, the road to the fabrication of integrated thermal energy scavengers or cooler, based on silicon, is still very long. In this work, the design and the fabrication process of on‐chip thermoelectric devices based on a large number of interconnected monocrystalline silicon nanobeams, very tall (>1 μm) and thin (less than 200 nanometers), arranged in large areas combs is shown. The small width of the nanobeams gives a reduced thermal conductivity, and the height perpendicular to the substrate allows the definition of a highly dense collection of nanostructures. The total cross‐section is far broader than that of other nanostructures, a characteristic that guarantees both mechanical stability and larger deliverable power per unit area.

Microfabrication of thermoelectric materials by silicon molding process

Development of Thermoelectric Microdevices by Combining Materials Processing and Silicon Micromachining Technology

Manufacturing thermoelectric micro modules using micromachined silicon wafers

Fabrication and Performance Simulation of Microscale Thermoelectric Modules Made with Bi2Te3-Based Alloys

Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices

Fabrication And Evaluation Of Microscale Thermoelectric Modules Of Bi2te3-Based Alloys

Fabrication and evaluation of microscale thermoelectric modules of Bi<sub>2</sub>Te<sub>3</sub>-based alloys

Microfabrication of Thermoelectric Modules by Patterned Electrodeposition Using a Multi-Channel Glass Template

Development of MEMS Process Compatible (Bi,Sb)2(Se,Te)3-Based Thin Films for Scalable Fabrication of Planar Micro-Thermoelectric Generators

Microfabrication Technology of Three-Dimensional Microdevices and Their Mems Applications

Fabrication of Si<sub>3</sub>N<sub>4</sub> Micro-Components by a Combined Microfabrication Process

On‐Chip Thermoelectric Devices Based on Standard Silicon Processing

Fabrication of Si3N4 micro-components by a combined microfabrication process

Optimization and Fabrication of MEMS suspended structures for nanoscale thermoelectric devices

Direct Melt-Calendaring of Highly Textured (Bi,Sb)2Te3 Thick Films: Superior Thermoelectric and Mechanical Performance via Strain Engineering

Large-scalable fabrication of improved Bi-Te-based flexible thermoelectric modules using a semiconductor manufacturing process

A new type of micro-thermoelectric power generator fabricated by nanowire array thermoelectric material

Manufacturing Miniature Si-Based Ceramic Rotors by Micro Reaction Sintering

Fabrication of a Silicide Thermoelectric Module Employing Fractional Factorial Design Principles

Miniaturized in-plane π-type thermoelectric device composed of a II–IV semiconductor thin film prepared by microfabrication

Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators