Abstract:This experimental work focuses on the design and fabrication of a basic module for integrated thermoelectric devices based on a large number of interconnected monocrystalline silicon nanobeams, very tall (>1 μm) and thin (less than 200 nanometers). The proposed structure shows high mechanical stability and very good values of deliverable power per unit area. The strong reduction of thermal conductivity with respect to bulk silicon makes nanostructured silicon one of the best materials for highly efficient direct conversion of heat into electrical power and vice‐versa. The widespread technologies for the integration of silicon devices can be used to define on‐chip micro thermoelectric generators (scavengers); similar structures could also be used for precise and well‐localized cooling through the reverse process of heat pumping. However, the road to the fabrication of integrated thermal energy scavengers or cooler, based on silicon, is still very long. In this work, the design and the fabrication process of on‐chip thermoelectric devices based on a large number of interconnected monocrystalline silicon nanobeams, very tall (>1 μm) and thin (less than 200 nanometers), arranged in large areas combs is shown. The small width of the nanobeams gives a reduced thermal conductivity, and the height perpendicular to the substrate allows the definition of a highly dense collection of nanostructures. The total cross‐section is far broader than that of other nanostructures, a characteristic that guarantees both mechanical stability and larger deliverable power per unit area.

Manufacturing thermoelectric micro modules using micromachined silicon wafers

Microfabrication of thermoelectric materials by silicon molding process

Development of Thermoelectric Microdevices by Combining Materials Processing and Silicon Micromachining Technology

Fabrication and evaluation of microscale thermoelectric modules of Bi<sub>2</sub>Te<sub>3</sub>-based alloys

Fabrication and Performance Simulation of Microscale Thermoelectric Modules Made with Bi2Te3-Based Alloys

Fabrication And Evaluation Of Microscale Thermoelectric Modules Of Bi2te3-Based Alloys

Microfabrication of Thermoelectric Modules by Patterned Electrodeposition Using a Multi-Channel Glass Template

Large-scalable fabrication of improved Bi-Te-based flexible thermoelectric modules using a semiconductor manufacturing process

Development of MEMS Process Compatible (Bi,Sb)2(Se,Te)3-Based Thin Films for Scalable Fabrication of Planar Micro-Thermoelectric Generators

Design and Simulation of a Novel Thermoelectric Micro-Device with Electrodeposited Bi-Te Alloys

Micro-thermoelectric Devices with Large Output Power Fabricated on a Multi-Channel Glass Template

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Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices

Flexible Micro Thermoelectric Generator based on Electroplated Bi2Te3

Large-scale SHS based 3D printing of high-performance n-type BiTeSe: Comprehensive development from materials to modules

A new type of micro-thermoelectric power generator fabricated by nanowire array thermoelectric material

Deposition and Fabrication of Sputtered Bismuth Telluride and Antimony Telluride for Microscale Thermoelectric Energy Harvesters

Fabrication of a Silicide Thermoelectric Module Employing Fractional Factorial Design Principles

Silicon integrated circuit thermoelectric generators with a high specific power generation capacity

Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators