Microfabrication of Thermoelectric Modules by Patterned Electrodeposition Using a Multi-Channel Glass Template

Da-Wei Liu,Jing-Feng Li
DOI: https://doi.org/10.1007/s10008-010-1104-y
IF: 2.747
2010-01-01
Journal of Solid State Electrochemistry
Abstract:A microfabrication process has been developed to elaborate microscale thermoelectric modules with high-aspect-ratio pillars assembled in a glass micromold, whose multi-channels are formed by combining mechanical machining and hot-pressing processes. This paper describes how to fill the multi-channel glass molds with thermoelectric materials by introducing a patterned electrochemical deposition method, in which a deposition cathode with two series of interdigital electrodes is designed. A reverse-pulsed electrodeposition method is found effective to overcome the difficulty for deep-filling that is required for fabricating thermoelectric pillars with high aspect ratios. A pulse circle of −200 mV for 4 s, +500 mV for 1 s, and 0 mV for 3 s (vs. saturated calomel electrode) was determined for preparing N-type Bi2Te3 arrays with a high aspect ratio exceeding ten from a solution containing 0.0075 M Bi3+ and 0.01 M HTeO 2 + . The as-deposited pillars show reasonable electrical resistivity as compared with common bulk Bi2Te3 materials.
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