Fabrication of Reaction-Sintered SisN_4 Ceramic Microrotors

Jing‐Feng Li,Satoshi Sugimoto,S. Tanaka,Masayoshi Esashi
2003-01-01
Abstract:This paper introduces a novel process for the microfabrication of Si3N4 ceramic microcomponents, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si performs and reaction sintering of the micromachined Si performs. The present process has its high potential for Si3N4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of Si3N4 reaction sintering. Using this process, we fabricated a reaction-sintered Si3N4 ceramic micro-turbine rotor that has a 5mm diameter, 1.2mm thickness, and whose blades are as thin as 70μm.
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