Abstract:In present work, sol-gel process is used to direct the organization of high quality and pore-free parasite PZT thin films with a composition near the morphotropic phase boundary (Zr/Ti = 52/48). The PZT transparent sol can be obtained by dissolving the zirconium oxynitrate, butyl titanate and lead acetate in ethylene glycol with the molar ratio of 0.52:0.48:1 and the PZT gel can be gained by spin-coating. In such process, PZT thin films can be readily prepared by hydrolysis on hot plate at 350°C for 20min and annealing in RTA at 650°C for 1 minute. The structural and electric characteristics of the films have been carried out by XRD, AFM and the C-V measurements, etc. Experimental results have indicated that by treating film RTA at 6508 for 1 minute film with perfect crystallization and good surface morphology with a RMS roughness of 2.0nm can be obtained, and the remnant polarization Pr (28.5 μC/cm2) and coercive field Ec (39.8kV/cm) are obtained in the P-E hysteresis loops. The films have a dielectric constant ε of 1080 and a dielectric loss tanδ of 0.01 at 1 kHz. Ferroelectric polarization fatigue test of the films has shown that high fatigue resistance up to 3 × 1010 cycles before Pr is decreased by 50%.

Evaluation of texture in Pb(Zr0.52Ti0.48)O 3 films prepared by sol-gel route

Evaluation of Texture in Pb(Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub> Films Prepared by Sol-Gel Route

Preparation of PZT Thick Film by a High Speed Sol-gel Method

Highly (100)-Textured Pb(Zr0.52Ti0.48)O3 Film Derived from a Modified Sol–gel Technique Using Inorganic Zirconium Precursor

Texture Evolution of Sol-Gel-Derived Pb(Zr,Ti)O-3 Film on Platinum Bottom Electrode with Different Annealing Process

Sol-Gel Process and Properties of Textured Pb(Zr, Ti)O-3 Films on Silicon Wafers

Preparation and Characterization of Sol–gel Derived (100)-Textured Pb(Zr,Ti)O3 Thin Films: PbO Seeding Role in the Formation of Preferential Orientation

Crystallization Behavior of PZT Film Prepared by Sol–gel Route

Residual Stress of Pb(ZrxTi1−x)O3 Films with Mixed Textures

Effect of Annealing Conditions on Residual Stress in Sol-Gel-derived Pb(Zr0.52Ti0.48)O3 Film

Investigation into Texture, Preferential Orientation, and Optical Properties of Zinc Oxide Nanopolycrystalline Thin Films Deposited by the Sol–Gel Technique on Different Substrates

Combined Effect of Preferential Orientation and Zr/Ti Atomic Ratio on Electrical Properties of Pb(ZrxTi1−x)O3 Thin Films

Study of annealed sol-gel PZT films prepared by reversed-dip-coating

PZT thin films with preferred-orientation induced by external stress

Growth and Characterization of Lead Zirconate Titanate (PZT) Thin Films

Oriented Growth In Pzt Thin Films

Effect of RF-sputtering Prameters on Txture in Pb(Zr, Ti)O3 Films

Structure and Electrical Properties of Rapid Thermally Annealed PZT Films Deposited Through Sol-Gel Process

Interface and Surface Characterization of Lead Zirconate Titanate Thin Films Grown by Sol–Gel Method

The structure and infrared absorption diagnostics of PZT thin films

The post crystallization process of lead zirconate titanate films and effects on dielectric properties