Abstract:Lead zirconate titanate Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thin films was successfully deposited on Pt(111)/Ti/SiO 2 /Si(100) substrates by a new modified sol-gel technique: precursor-monomer method. In this process three separated Pb 2 + , Zr 4 + , Ti 4 + precursor-monomers and metal chelating agents were mixed together to prepare PZT sol-solution (precursor). The precursor-monomer method has several advantages over conventional sol-gel methods, including easy change the atomic ratio of Pb 2 + /Zr 4 + /Ti 4 + and doping metallic ions, rapid PZT precursor synthesis, low processing temperature, without dry condition and distillation, long storage period, simplicity and low cost, etc. The paper investigated the effects of hydrolysis degree on the stability of PZT precursor, and it was found that the sample with 12.5% (v/v) adding water had the longest storage time. The inference of lead titanate (PbTiO 3 , PT) seeding layers on the microstructures, surface morphologies and ferroelectric properties of PZT films has also been systematically examined. We found that PZT films with PT/PZT/PT structure had lower perovskite phase crystallization temperature, larger grain size, better microstructure and ferroelectric properties as compared with no PT seeding layers films.

Study of annealed sol-gel PZT films prepared by reversed-dip-coating

Preparation of PZT Thick Film by a High Speed Sol-gel Method

Growth and ferroelectric properties of sol-gel derived Pb(Zr,Ti)O3 using inorganic zirconium precursor

Crystallization Behavior of PZT Film Prepared by Sol–gel Route

Growth and Characterization of Lead Zirconate Titanate (PZT) Thin Films

Structure and Electrical Properties of Rapid Thermally Annealed PZT Films Deposited Through Sol-Gel Process

Texture Evolution of Sol-Gel-Derived Pb(Zr,Ti)O-3 Film on Platinum Bottom Electrode with Different Annealing Process

Effect of Annealing Conditions on Residual Stress in Sol-Gel-derived Pb(Zr0.52Ti0.48)O3 Film

Study on synthesis of PZT nano-crystalline powders by the modified sol-gel method and the crystalline transition process

Low Temperature Preparation Of Sol-Gel Pzt Thin Film Annealed At 160 Degrees C By Hydrothermal Method

Sol–gel synthesis and characterization of PZT thin films on FTO/aluminoborosilicate glass substrates

Low Temperature Preparation of Sol-Gel PZT Thin Film Annealed at 160°C by Hydrothermal Method

Highly (100)-Textured Pb(Zr0.52Ti0.48)O3 Film Derived from a Modified Sol–gel Technique Using Inorganic Zirconium Precursor

Study of silicon-based ferroelectric thin films prepared by Sol-Gel method

Preparation and characterization of Sol-Gel derived PZT bulk ceramics and thin films

Evaluation of texture in Pb(Zr0.52Ti0.48)O 3 films prepared by sol-gel route

Precursor-Monomer Method of Sol-Gel for Fabrication Pt/Pzt/Pt Ferroelectric Films

Study of silicon-based ferroelectric PZT thin films fabricated by sol-gel method

Separated Precursor-Monomer for Sol-Gel Preparation PZT Ferroelectric Film

Synthesis of PZT Nano-crystalline Powder by Sol-gel Method and Structure Characterization

Mechanical Properties of Sol–gel Derived Lead Zirconate Titanate Thin Films by Nanoindentation