Surface States in the Al x Ga 1-x N Barrier in Al x Ga 1-x N/GaN Heterostructures

Liu Jie,Shen Bo,Wang Mao-Jun,Zhou Yu-Gang,Chen Dun-Jun,Zhang Rong,Shi Yi,Zheng Youdou
DOI: https://doi.org/10.1088/0256-307x/21/1/051
2004-01-01
Chinese Physics Letters
Abstract:Frequency-dependent capacitance–voltage (C–V) measurements have been performed on modulation-doped Al0.22 Ga0.78N/GaN heterostructures to investigate the characteristics of the surface states in the AlxGa1−xN barrier. Numerical fittings based on the experimental data indicate that there are surface states with high density locating on the AlxGa1−xN barrier. The density of the surface states is about 1012 cm−2eV−1, and the time constant is about 1 μs. It is found that an insulating layer (Si3N4) between the metal contact and the surface of AlxGa1−xN can passivate the surface states effectively.
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