Investigation on two-dimensional electron gas in AlxGa1-xN/GaN heterostructures by using Schottky C-V measurement

Yugang Zhou,Bo Shen,Jie Liu,Huiqiang Yu,HuiMei Zhou,Yue Qian,Rong Zhang,Yi Shi,Youdou Zheng
2001-01-01
Abstract:Concentration and spatial distribution of the two-dimensional electron gas (2DEG) near the Al0.22Ga0.78N/GaN heterointerface are investigated by Schottky C-V measurement. The peak value of the 2DEG concentration occurs at 1.3 nm beneath the heterointerface. The full width at half maximum (FWHM) of the 2DEG peak is 2.3 nm and the sheet density of the 2DEG is 6.5×1012cm-2. The sheet density of the 2DEG is one order higher and the FWHM is one order lower than those in AlxGa1-xAs/GaAs heterostructures because of the piezoelectrically induced polarization field in the order of-MV/cm, which will strongly modulate the conduction-band of AlxGa1-xN/GaN heterostructure as well as the much larger conduction band discontinuity in the AlxGa1-xN/GaN heterointerface.
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