Study of heat transfer on notching effect in DRIE

Xiuhan Li,Dacheng Zhang,Xiaomei Yu
2004-01-01
Abstract:This paper presents the influence of heat transfer on notching effect during the overetching time for anodically bonded glass-silicon structures in deep reactive ion etching (DRIE). Our conclusions were fully proved through contrastive experiments and finite element simulation in ANSYS. Another reason owing to notching effect was brought forward on the basis of pre-study. Finally, the method to avoid notching effect is also proposed.
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