Growth of High-Quality Cuinse2 Polycrystalline Films by Magnetron Sputtering and Vacuum Selenisation

DT Xie,K Zhao,LF Wang,F Zhu,SW Quan,TJ Meng,BC Zhang,JE Chen
DOI: https://doi.org/10.7498/aps.51.1377
IF: 0.906
2002-01-01
Acta Physica Sinica
Abstract:High-quality CuInSe2 thin films have been prepared using a two stages process. Cu and In were co-deposited onto glass substrates by magnetron sputtering method to produce a predominant Cu11In9 phase. The alloy films were selenised and annealed in vacuum at different temperature in the range of 200-500degreesC using elemental selenium in a closed graphite box. X-ray diffraction and scanning electron microscopy were used to characterize the films. It was found that the polycrystalline and single-phase CuInSe2 films were uniform and densely packed with a grain size of about 3.0mum.
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